Examples

plasma technology GmbH

Dipl.-Ing. (FH) Joerg Eisenlohr

Etzwiesenstr. 33

D-72108 Rottenburg a.N.

GERMANY

fon: +49 (0) 74 57 / 73 15 - 39

fax: +49 (0) 74 57 / 73 15 - 44

E-Mail: info@plasmatechnology.de

Examples


	Plasma etching “Exposure of a microchip”





	Here a view into the vacuum chamber with burning plasma.


			POM before and after plasma etching



		Source: University for Applied Sciences Esslingen a.N.


	Colours of plasma: Colours and effects of different gases in the plasma

Oxygen (O2)
Oxygen in its pure form generates a flat yellow colour

Helium (He)
Helium generates a very light colur between blue and purple red colour in the plasma.

Neon (Ne)
Neon generates the most light colour (see neon tube) and normally gives a red-orange colour.

Xenon (Xe)
Gives a light white / light grey colour.

Krypton (Kr)
Bluish white or bluish grey.

Nitrogen (N2)
Colour is moderate light, ramifications normally are a whitish or greyish pink with a blue purple red tendency. The colour becomes more greyish (lavender) at low flows.

Carbon dioxyde (CO2)
Glows rather brightly, whitish or blue-whitish colour.

Air (nitrogen, oxygen, water vapour)
This plasma requires more voltage than noble gases and does not glow very bright. The colour of the plasma normally is pink – purple red and becomes whiter at an increased electric current.

Argon (Ar)
the intensity is similar to that of nitrogen plasma – violet / lavender